Formation of β-Be3N2 nanocrystallites in Be-implanted GaN

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Blistering of H-implanted GaN

Mechanisms of blistering of wurtzite GaN films implanted with H ions are studied. In particular, we report on the influence of the following parameters on the blistering process: ~i! ion energy ~from 20 to 150 keV!, ~ii! ion dose ~up to 1.2310 cm!, ~iii! implantation temperature ~from 2196 to 250 °C!, and ~iv! annealing temperature ~up to 900 °C!. Results show that both the onset of blistering ...

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Formation and in situ dynamics of metallic nanoblisters in Ga implanted GaN nanowires

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ژورنال

عنوان ژورنال: Materials Research Express

سال: 2021

ISSN: 2053-1591

DOI: 10.1088/2053-1591/abea59